FATIGUE AND WEAR IN SILICON STRUCTURAL FILMS FOR MICROELECTROMECHANICAL SYSTEMS APPLICATIONS



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Journal Publications

8. Wear Mechanisms And Friction Parameters For Sliding Wear Of Micron-Scale Polysilicon Sidewalls, D.H. Alsem, R. van der Hulst, E.A. Stach, M.T. Dugger, J.Th.M. De Hosson and R.O. Ritchie, Journal of Micromechanics and Microengineering, to be submitted, October 2008.

7. Micron-Scale Friction And Sliding Wear Of Polycrystalline Silicon Thin Structural Films In Ambient Air, D.H. Alsem, E.A. Stach, M.T. Dugger and R.O. Ritchie, Journal of Microelectromechanical Systems, in press DOI:10.1109/JMEMS.2008.927751, 2008.

6. Further Considerations On The High-Cycle Fatigue Of Micron-Scale Polycrystalline Silicon, D.H. Alsem, C.L. Muhlstein, E.A. Stach and R.O. Ritchie, Scripta Materialia, vol. 59, 2008, pp. 931-935, (Invited paper).

5. Effect Of Post-Release Sidewall Morphology On The Fracture And Fatigue Properties Of Polycrystalline Silicon Structural Films, D.H. Alsem, B.L. Boyce, E.A. Stach and R.O. Ritchie, Sensors and Actuators A, vol. 147, 2008, pp. 553-560.

4. Mechanisms For Fatigue Of Micron-Scale Silicon Structural Films, D.H. Alsem, O.N. Pierron, E.A. Stach, C.L. Muhlstein and R.O. Ritchie, Advanced Engineering Materials, vol 9, no 1-2, 2007, pp. 15-30.

3. Very High-Cycle Fatigue Failure In Micron-Scale Poly-Crystalline Silicon Films: Effects Of Environment And Surface Oxide Thickness, D.H. Alsem, R. Timmerman, B.L. Boyce, E.A. Stach, J.Th.M. de Hosson and R.O. Ritchie, Journal of Applied Physics, vol 101, Jan 2007, pp. 013515.

2. An Electron Microscopy Study Of Wear In Polysilicon Microelectromechanical Systems In Ambient Air, D.H. Alsem, E.A. Stach, M.T. Dugger, Marius Enachescu and R.O. Ritchie, Thin Solid Films, vol 515, 2007, pp. 3259–3266.

1. Fatigue Failure In Thin-Film Polycrystalline Silicon Is Due To Subcritical Cracking Within The Oxide Layer, D.H. Alsem, E.A. Stach, C.L. Muhlstein and R.O. Ritchie, Applied Physics Letters, vol 86, Jan 2005, pp. 41914-1-3.

Last updated 09/29/08 by Daan Hein Alsem (dhalsem@lbl.gov)