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Center for X-ray Optics

Patrick Naulleau, Director

The Center for X-Ray Optics works to advance the science and technology of short-wave optical systems with applications using extreme ultraviolet light (EUV), soft x-ray radiation and nanostructure fabrication. CXRO pursues a broad range of projects and develops new instrumentation to address national needs and technical challenges that impact materials, life, environmental sciences, and x-ray optics. This includes high spatial resolution imaging to study complex systems, characterize thin films, surfaces, and new materials, and to extend the forefront of semiconductor manufacturing with high accuracy interferometry, metrology and lithography research and development.

Please visit the CXRO website to learn more.