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Porcelain-Coated RF Antenna

IB-918

E.O. Lawrence Berkeley National Laboratory

APPLICATIONS OF TECHNOLOGY:

ADVANTAGES:

ABSTRACT: Long-lasting, versatile RF antenna for clean plasma generation. Ka-Ngo Leung and colleagues at Berkeley National Laboratory have designed a porcelain-coated antenna improves ion and plasma sources used to generate positive, negative or neutral particle beams. Used for ion implantation it allows the processing of large, irregularly-shaped objects, such as whole engine blocks, difficult or impossible to do before now. It works with corrosive gases, has a much longer life time than conventional sources, and does not require expensive electronics. It does not suffer from sputtering, assuring cleaner plasmas and purer ion implants.

The RF antenna has excellent thermal coupling between its hard porcelain enamel coating and water-cooled metal-tube substrate, allowing it to operate at high temperatures for longer periods of time. Since the antenna is cooled it will not cause radiative heating problems in ion implant applications. This cooling also protects the antenna chamber mount. The hard coating prevents unwanted sputtering, ensuring a life span at least ten times as long as standard ion sources. Its non-reactive properties also make it ideal for ion implantation applications with corrosive gases and for continuous operation applications. Due to its sturdy construction it can survive mechanical impacts, heat stress and a hot plasma environment.

STATUS: U.S. Patent #5,587,226. Available for licensing in specific fields of use

REFERENCE NUMBER: IB-918

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